The best Side of Noohapou
The best Side of Noohapou
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The POU3500 technique gives dynamic temperature Charge of the procedure chamber cathode / electrode / anode and will be synchronized with any etch procedure.
30% of its peak ability usage, giving our buyers significant reduction in running costs and increased trustworthiness.
With the POU3500, you are able to achieve unparalleled leads to etch performance, chamber uptime, minimized price of possession and fab Area utilization – all although improving your method trustworthiness.
at first Started in 1985, our enterprise has developed into a regarded chief in supplying temperature control techniques to the global semiconductor marketplace.
This exceptional program, presenting a little sort factor, affordable-of-possession and Dynamic Temperature Management presented approach and products engineers a new Device to optimize their temperature sensitive procedures.
we've been guided inside our belief that prosperity In this particular competitive sector stems from furnishing shoppers with highly engineered check here new products and solutions and environment course customer service.
The accuracy from the POU 3500 permits independent control of the procedure fluid temperature on the wafer chuck in just +/- 0.one °C of established point, and also the rapid reaction time from the process lets for max wafer-to-wafer repeatability throughout the etch approach.
With all the POU3300, you may accomplish unparalleled results in etch functionality, chamber uptime, diminished expense of ownership and fab Place utilization – all though increasing your process reliability.
the info pertains to a 300mm chamber temperature profile in the course of a higher component ratio Etch method, working at pretty large RF power disorders (~3.8kW). The persuasive areas of this knowledge established are:
LAUDA-Noah is meeting these new difficulties and has integrated energy saving know-how in techniques which have been helpful for the atmosphere and possess a affordable to function.
The TEs' can change directly from heating to cooling, or visa-versa. they might switch on & off while in the heating or cooling mode and may maximize or lower the level of heating or cooling with out switching in anyway.
in excess of at any time, shrinking machine geometries, demanding new procedures plus a hugely aggressive surroundings involve temperature control methods that Blend quickly and precise temperature Manage having an emphasis on minimized running expenses and improved reliability.
Confirmed; TEs' depict just one part of a chiller's style and design. The switching & control strategies employed by a chiller will impression the TEs' trustworthiness.
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We involve a lot less cooling/heating capability for the same application as a static TCU as a result of our little reservoir volume.
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